WONG, Wai Chi ;AZID, Ishak Abdul ;YEOP MAJLIS, Burhanuddin . Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer. Strojniški vestnik - Journal of Mechanical Engineering, [S.l.], v. 57, n.6, p. 517-525, june 2018. ISSN 0039-2480. Available at: <https://www.sv-jme.eu/sl/article/theoretical-analysis-of-stiffness-constant-and-effective-mass-for-a-round-folded-beam-in-mems-accelerometer/>. Date accessed: 19 nov. 2024. doi:http://dx.doi.org/10.5545/sv-jme.2009.151.
Wong, W., Azid, I., & Yeop Majlis, B. (2011). Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer. Strojniški vestnik - Journal of Mechanical Engineering, 57(6), 517-525. doi:http://dx.doi.org/10.5545/sv-jme.2009.151
@article{sv-jmesv-jme.2009.151,
author = {Wai Chi Wong and Ishak Abdul Azid and Burhanuddin Yeop Majlis},
title = {Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer},
journal = {Strojniški vestnik - Journal of Mechanical Engineering},
volume = {57},
number = {6},
year = {2011},
keywords = {effective mass; folded beam; MEMS-accelerometer; stiffness constant; strain energy},
abstract = {In this paper, the governing equations of stiffness constant and effective mass for a round folded suspension beam in Micro-Electro Mechanical System (MEMS) accelerometer are derived and solved. The stiffness constant is determined by the strain energy and Castigliano’s displacement theorem, whereas the effective mass is determined by the Rayleigh principle. The stiffness constant and the effective mass are solved separately by components and then combined by using the superposition method. The results obtained by the derived equations agree well when compared with the finite element results for several thickness values. The governing equations derived in this paper can be used to predict the natural frequencies and sensitivity of the MEMS-accelerometer.},
issn = {0039-2480}, pages = {517-525}, doi = {10.5545/sv-jme.2009.151},
url = {https://www.sv-jme.eu/sl/article/theoretical-analysis-of-stiffness-constant-and-effective-mass-for-a-round-folded-beam-in-mems-accelerometer/}
}
Wong, W.,Azid, I.,Yeop Majlis, B. 2011 June 57. Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer. Strojniški vestnik - Journal of Mechanical Engineering. [Online] 57:6
%A Wong, Wai Chi %A Azid, Ishak Abdul %A Yeop Majlis, Burhanuddin %D 2011 %T Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer %B 2011 %9 effective mass; folded beam; MEMS-accelerometer; stiffness constant; strain energy %! Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer %K effective mass; folded beam; MEMS-accelerometer; stiffness constant; strain energy %X In this paper, the governing equations of stiffness constant and effective mass for a round folded suspension beam in Micro-Electro Mechanical System (MEMS) accelerometer are derived and solved. The stiffness constant is determined by the strain energy and Castigliano’s displacement theorem, whereas the effective mass is determined by the Rayleigh principle. The stiffness constant and the effective mass are solved separately by components and then combined by using the superposition method. The results obtained by the derived equations agree well when compared with the finite element results for several thickness values. The governing equations derived in this paper can be used to predict the natural frequencies and sensitivity of the MEMS-accelerometer. %U https://www.sv-jme.eu/sl/article/theoretical-analysis-of-stiffness-constant-and-effective-mass-for-a-round-folded-beam-in-mems-accelerometer/ %0 Journal Article %R 10.5545/sv-jme.2009.151 %& 517 %P 9 %J Strojniški vestnik - Journal of Mechanical Engineering %V 57 %N 6 %@ 0039-2480 %8 2018-06-28 %7 2018-06-28
Wong, Wai Chi, Ishak Abdul Azid, & Burhanuddin Yeop Majlis. "Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer." Strojniški vestnik - Journal of Mechanical Engineering [Online], 57.6 (2011): 517-525. Web. 19 Nov. 2024
TY - JOUR AU - Wong, Wai Chi AU - Azid, Ishak Abdul AU - Yeop Majlis, Burhanuddin PY - 2011 TI - Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer JF - Strojniški vestnik - Journal of Mechanical Engineering DO - 10.5545/sv-jme.2009.151 KW - effective mass; folded beam; MEMS-accelerometer; stiffness constant; strain energy N2 - In this paper, the governing equations of stiffness constant and effective mass for a round folded suspension beam in Micro-Electro Mechanical System (MEMS) accelerometer are derived and solved. The stiffness constant is determined by the strain energy and Castigliano’s displacement theorem, whereas the effective mass is determined by the Rayleigh principle. The stiffness constant and the effective mass are solved separately by components and then combined by using the superposition method. The results obtained by the derived equations agree well when compared with the finite element results for several thickness values. The governing equations derived in this paper can be used to predict the natural frequencies and sensitivity of the MEMS-accelerometer. UR - https://www.sv-jme.eu/sl/article/theoretical-analysis-of-stiffness-constant-and-effective-mass-for-a-round-folded-beam-in-mems-accelerometer/
@article{{sv-jme}{sv-jme.2009.151},
author = {Wong, W., Azid, I., Yeop Majlis, B.},
title = {Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer},
journal = {Strojniški vestnik - Journal of Mechanical Engineering},
volume = {57},
number = {6},
year = {2011},
doi = {10.5545/sv-jme.2009.151},
url = {https://www.sv-jme.eu/sl/article/theoretical-analysis-of-stiffness-constant-and-effective-mass-for-a-round-folded-beam-in-mems-accelerometer/}
}
TY - JOUR AU - Wong, Wai Chi AU - Azid, Ishak Abdul AU - Yeop Majlis, Burhanuddin PY - 2018/06/28 TI - Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer JF - Strojniški vestnik - Journal of Mechanical Engineering; Vol 57, No 6 (2011): Strojniški vestnik - Journal of Mechanical Engineering DO - 10.5545/sv-jme.2009.151 KW - effective mass, folded beam, MEMS-accelerometer, stiffness constant, strain energy N2 - In this paper, the governing equations of stiffness constant and effective mass for a round folded suspension beam in Micro-Electro Mechanical System (MEMS) accelerometer are derived and solved. The stiffness constant is determined by the strain energy and Castigliano’s displacement theorem, whereas the effective mass is determined by the Rayleigh principle. The stiffness constant and the effective mass are solved separately by components and then combined by using the superposition method. The results obtained by the derived equations agree well when compared with the finite element results for several thickness values. The governing equations derived in this paper can be used to predict the natural frequencies and sensitivity of the MEMS-accelerometer. UR - https://www.sv-jme.eu/sl/article/theoretical-analysis-of-stiffness-constant-and-effective-mass-for-a-round-folded-beam-in-mems-accelerometer/
Wong, Wai Chi, Azid, Ishak Abdul, AND Yeop Majlis, Burhanuddin. "Theoretical Analysis of Stiffness Constant and Effective Mass for a Round-Folded Beam in MEMS Accelerometer" Strojniški vestnik - Journal of Mechanical Engineering [Online], Volume 57 Number 6 (28 June 2018)
Strojniški vestnik - Journal of Mechanical Engineering 57(2011)6, 517-525
© The Authors, CC-BY 4.0 Int. Change in copyright policy from 2022, Jan 1st.
In this paper, the governing equations of stiffness constant and effective mass for a round folded suspension beam in Micro-Electro Mechanical System (MEMS) accelerometer are derived and solved. The stiffness constant is determined by the strain energy and Castigliano’s displacement theorem, whereas the effective mass is determined by the Rayleigh principle. The stiffness constant and the effective mass are solved separately by components and then combined by using the superposition method. The results obtained by the derived equations agree well when compared with the finite element results for several thickness values. The governing equations derived in this paper can be used to predict the natural frequencies and sensitivity of the MEMS-accelerometer.