Modelling and analysis of a combined electronic and micro-mechanical system

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ATANASIJEVIĆ-KUNC, Maja ;KUNC, Vinko ;DIACI, Janez ;KARBA, Rihard .
Modelling and analysis of a combined electronic and micro-mechanical system. 
Strojniški vestnik - Journal of Mechanical Engineering, [S.l.], v. 54, n.7-8, p. 539-546, august 2017. 
ISSN 0039-2480.
Available at: <https://www.sv-jme.eu/article/modelling-and-analysis-of-a-combined-electronic-and-micro-mechanical-system/>. Date accessed: 20 dec. 2024. 
doi:http://dx.doi.org/.
Atanasijević-Kunc, M., Kunc, V., Diaci, J., & Karba, R.
(2008).
Modelling and analysis of a combined electronic and micro-mechanical system.
Strojniški vestnik - Journal of Mechanical Engineering, 54(7-8), 539-546.
doi:http://dx.doi.org/
@article{.,
	author = {Maja  Atanasijević-Kunc and Vinko  Kunc and Janez  Diaci and Rihard  Karba},
	title = {Modelling and analysis of a combined electronic and micro-mechanical system},
	journal = {Strojniški vestnik - Journal of Mechanical Engineering},
	volume = {54},
	number = {7-8},
	year = {2008},
	keywords = {micro-mechanical system; modelling; acceleration sensor; control design; },
	abstract = {The modelling of micro-mechanical systems in combination with integrated electronic circuits is a complex task demanding a knowledge of mechanical and microelectronic design in combination with system-modelling expertise, especially in cases where new possibilities regarding system construction and its properties are taken into account. Such modelling is becoming increasingly important because of the rapid growth of so-called "smart sensor" applications based on micro-mechanical devices. Our task was to create a reliable model of a micro-mechanical acceleration sensor that uses an extremely small and easy-to-produce mechanical system. The suspended mass and the output signal of this sensor are one order of magnitude smaller than existing systems. The described model was used for the further development of the mechanical and electrical parts of the system. The modelling inputs were the measurement data of the prototype devices, comprising the static characteristics of the device and the system responses to step-function excitation. Together with known physical properties and basic theoretical equations these data enabled us to create the described model, which showed good agreement with the measurement results.},
	issn = {0039-2480},	pages = {539-546},	doi = {},
	url = {https://www.sv-jme.eu/article/modelling-and-analysis-of-a-combined-electronic-and-micro-mechanical-system/}
}
Atanasijević-Kunc, M.,Kunc, V.,Diaci, J.,Karba, R.
2008 August 54. Modelling and analysis of a combined electronic and micro-mechanical system. Strojniški vestnik - Journal of Mechanical Engineering. [Online] 54:7-8
%A Atanasijević-Kunc, Maja 
%A Kunc, Vinko 
%A Diaci, Janez 
%A Karba, Rihard 
%D 2008
%T Modelling and analysis of a combined electronic and micro-mechanical system
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%! Modelling and analysis of a combined electronic and micro-mechanical system
%K micro-mechanical system; modelling; acceleration sensor; control design; 
%X The modelling of micro-mechanical systems in combination with integrated electronic circuits is a complex task demanding a knowledge of mechanical and microelectronic design in combination with system-modelling expertise, especially in cases where new possibilities regarding system construction and its properties are taken into account. Such modelling is becoming increasingly important because of the rapid growth of so-called "smart sensor" applications based on micro-mechanical devices. Our task was to create a reliable model of a micro-mechanical acceleration sensor that uses an extremely small and easy-to-produce mechanical system. The suspended mass and the output signal of this sensor are one order of magnitude smaller than existing systems. The described model was used for the further development of the mechanical and electrical parts of the system. The modelling inputs were the measurement data of the prototype devices, comprising the static characteristics of the device and the system responses to step-function excitation. Together with known physical properties and basic theoretical equations these data enabled us to create the described model, which showed good agreement with the measurement results.
%U https://www.sv-jme.eu/article/modelling-and-analysis-of-a-combined-electronic-and-micro-mechanical-system/
%0 Journal Article
%R 
%& 539
%P 8
%J Strojniški vestnik - Journal of Mechanical Engineering
%V 54
%N 7-8
%@ 0039-2480
%8 2017-08-21
%7 2017-08-21
Atanasijević-Kunc, Maja, Vinko  Kunc, Janez  Diaci, & Rihard  Karba.
"Modelling and analysis of a combined electronic and micro-mechanical system." Strojniški vestnik - Journal of Mechanical Engineering [Online], 54.7-8 (2008): 539-546. Web.  20 Dec. 2024
TY  - JOUR
AU  - Atanasijević-Kunc, Maja 
AU  - Kunc, Vinko 
AU  - Diaci, Janez 
AU  - Karba, Rihard 
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TI  - Modelling and analysis of a combined electronic and micro-mechanical system
JF  - Strojniški vestnik - Journal of Mechanical Engineering
DO  - 
KW  - micro-mechanical system; modelling; acceleration sensor; control design; 
N2  - The modelling of micro-mechanical systems in combination with integrated electronic circuits is a complex task demanding a knowledge of mechanical and microelectronic design in combination with system-modelling expertise, especially in cases where new possibilities regarding system construction and its properties are taken into account. Such modelling is becoming increasingly important because of the rapid growth of so-called "smart sensor" applications based on micro-mechanical devices. Our task was to create a reliable model of a micro-mechanical acceleration sensor that uses an extremely small and easy-to-produce mechanical system. The suspended mass and the output signal of this sensor are one order of magnitude smaller than existing systems. The described model was used for the further development of the mechanical and electrical parts of the system. The modelling inputs were the measurement data of the prototype devices, comprising the static characteristics of the device and the system responses to step-function excitation. Together with known physical properties and basic theoretical equations these data enabled us to create the described model, which showed good agreement with the measurement results.
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@article{{}{.},
	author = {Atanasijević-Kunc, M., Kunc, V., Diaci, J., Karba, R.},
	title = {Modelling and analysis of a combined electronic and micro-mechanical system},
	journal = {Strojniški vestnik - Journal of Mechanical Engineering},
	volume = {54},
	number = {7-8},
	year = {2008},
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TY  - JOUR
AU  - Atanasijević-Kunc, Maja 
AU  - Kunc, Vinko 
AU  - Diaci, Janez 
AU  - Karba, Rihard 
PY  - 2017/08/21
TI  - Modelling and analysis of a combined electronic and micro-mechanical system
JF  - Strojniški vestnik - Journal of Mechanical Engineering; Vol 54, No 7-8 (2008): Strojniški vestnik - Journal of Mechanical Engineering
DO  - 
KW  - micro-mechanical system, modelling, acceleration sensor, control design, 
N2  - The modelling of micro-mechanical systems in combination with integrated electronic circuits is a complex task demanding a knowledge of mechanical and microelectronic design in combination with system-modelling expertise, especially in cases where new possibilities regarding system construction and its properties are taken into account. Such modelling is becoming increasingly important because of the rapid growth of so-called "smart sensor" applications based on micro-mechanical devices. Our task was to create a reliable model of a micro-mechanical acceleration sensor that uses an extremely small and easy-to-produce mechanical system. The suspended mass and the output signal of this sensor are one order of magnitude smaller than existing systems. The described model was used for the further development of the mechanical and electrical parts of the system. The modelling inputs were the measurement data of the prototype devices, comprising the static characteristics of the device and the system responses to step-function excitation. Together with known physical properties and basic theoretical equations these data enabled us to create the described model, which showed good agreement with the measurement results.
UR  - https://www.sv-jme.eu/article/modelling-and-analysis-of-a-combined-electronic-and-micro-mechanical-system/
Atanasijević-Kunc, Maja, Kunc, Vinko, Diaci, Janez, AND Karba, Rihard.
"Modelling and analysis of a combined electronic and micro-mechanical system" Strojniški vestnik - Journal of Mechanical Engineering [Online], Volume 54 Number 7-8 (21 August 2017)

Authors

Affiliations

  • University of Ljubljana, Faculty Electrical Engineering, Slovenia
  • IDS d.o.o. integrated circuits, Ljubljana, Slovenia
  • University of Ljubljana, Faculty of Mechanical Engineering, Slovenia
  • University of Ljubljana, Faculty Electrical Engineering, Slovenia

Paper's information

Strojniški vestnik - Journal of Mechanical Engineering 54(2008)7-8, 539-546
© The Authors, CC-BY 4.0 Int. Change in copyright policy from 2022, Jan 1st.

The modelling of micro-mechanical systems in combination with integrated electronic circuits is a complex task demanding a knowledge of mechanical and microelectronic design in combination with system-modelling expertise, especially in cases where new possibilities regarding system construction and its properties are taken into account. Such modelling is becoming increasingly important because of the rapid growth of so-called "smart sensor" applications based on micro-mechanical devices. Our task was to create a reliable model of a micro-mechanical acceleration sensor that uses an extremely small and easy-to-produce mechanical system. The suspended mass and the output signal of this sensor are one order of magnitude smaller than existing systems. The described model was used for the further development of the mechanical and electrical parts of the system. The modelling inputs were the measurement data of the prototype devices, comprising the static characteristics of the device and the system responses to step-function excitation. Together with known physical properties and basic theoretical equations these data enabled us to create the described model, which showed good agreement with the measurement results.

micro-mechanical system; modelling; acceleration sensor; control design;